A study of degradation of indium tin oxide thin films on glass for display applications
Identifieur interne : 001190 ( Main/Repository ); précédent : 001189; suivant : 001191A study of degradation of indium tin oxide thin films on glass for display applications
Auteurs : RBID : Pascal:12-0436265Descripteurs français
- Pascal (Inist)
- Dégradation, Endommagement, Addition étain, Couche ITO, Affichage cristaux liquides, Contamination, Humidité, Corrosion, Essai accéléré, Interconnexion, Essai rayage, Aire superficielle, Oxyde d'indium, Couche mince, Verre, Matériau anisotrope, Matériau conducteur, Matériau composite, Matériau dopé, Affichage écran plat, Circuit intégré, 8105K, 6860B, ITO.
- Wicri :
- concept : Corrosion, Verre, Matériau composite.
English descriptors
- KwdEn :
- Accelerated test, Anisotropic material, Composite material, Conducting material, Contamination, Corrosion, Damaging, Degradation, Doped materials, Flat panel displays, Glass, Humidity, ITO layers, Indium oxide, Integrated circuit, Interconnection, Liquid crystal displays, Scratching test, Surface area, Thin film, Tin addition.
Abstract
Indium tin oxide (ITO) has been widely used in liquid crystal displays (LCD). Contamination and moisture have proved to have the adverse effect of causing ITO corrosion/degradation. The purpose of this paper is to determine if scratching the surface of ITO is a cause of ITO degradation. Additionally, the influence of the width of ITO tracks on degradation was observed under accelerated testing. Simultaneously, anisotropic conductive adhesive film (ACF) was added to the ITO surface, to determine any adverse degradation effect. It was determined that the time to initiate corrosion was faster if the ITO was scratched, and that the degradation was directly related to the surface area of the ITO electrodes.
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<record><TEI><teiHeader><fileDesc><titleStmt><title xml:lang="en" level="a">A study of degradation of indium tin oxide thin films on glass for display applications</title><author><name sortKey="Leung, W S" uniqKey="Leung W">W. S. Leung</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Department of Electronic Engineering, City University of Hong Kong, 83 Tat Chee Avenue</s1><s2>Kowloon Tong</s2><s3>HKG</s3><sZ>1 aut.</sZ><sZ>2 aut.</sZ></inist:fA14><country>Hong Kong</country><wicri:noRegion>Kowloon Tong</wicri:noRegion></affiliation></author><author><name sortKey="Chan, Y C" uniqKey="Chan Y">Y. C. Chan</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Department of Electronic Engineering, City University of Hong Kong, 83 Tat Chee Avenue</s1><s2>Kowloon Tong</s2><s3>HKG</s3><sZ>1 aut.</sZ><sZ>2 aut.</sZ></inist:fA14><country>Hong Kong</country><wicri:noRegion>Kowloon Tong</wicri:noRegion></affiliation></author><author><name sortKey="Lui, S M" uniqKey="Lui S">S. M. Lui</name><affiliation wicri:level="1"><inist:fA14 i1="02"><s1>Varitronix Group, 9/F, Liven House, 61-63 King Yip Street</s1><s2>Kwun Tong, Kowloon</s2><s3>HKG</s3><sZ>3 aut.</sZ></inist:fA14><country>Hong Kong</country><wicri:noRegion>Kwun Tong, Kowloon</wicri:noRegion></affiliation></author></titleStmt><publicationStmt><idno type="inist">12-0436265</idno><date when="2013">2013</date><idno type="stanalyst">PASCAL 12-0436265 INIST</idno><idno type="RBID">Pascal:12-0436265</idno><idno type="wicri:Area/Main/Corpus">001589</idno><idno type="wicri:Area/Main/Repository">001190</idno></publicationStmt><seriesStmt><idno type="ISSN">0167-9317</idno><title level="j" type="abbreviated">Microelectron. eng.</title><title level="j" type="main">Microelectronic engineering</title></seriesStmt></fileDesc><profileDesc><textClass><keywords scheme="KwdEn" xml:lang="en"><term>Accelerated test</term><term>Anisotropic material</term><term>Composite material</term><term>Conducting material</term><term>Contamination</term><term>Corrosion</term><term>Damaging</term><term>Degradation</term><term>Doped materials</term><term>Flat panel displays</term><term>Glass</term><term>Humidity</term><term>ITO layers</term><term>Indium oxide</term><term>Integrated circuit</term><term>Interconnection</term><term>Liquid crystal displays</term><term>Scratching test</term><term>Surface area</term><term>Thin film</term><term>Tin addition</term></keywords><keywords scheme="Pascal" xml:lang="fr"><term>Dégradation</term><term>Endommagement</term><term>Addition étain</term><term>Couche ITO</term><term>Affichage cristaux liquides</term><term>Contamination</term><term>Humidité</term><term>Corrosion</term><term>Essai accéléré</term><term>Interconnexion</term><term>Essai rayage</term><term>Aire superficielle</term><term>Oxyde d'indium</term><term>Couche mince</term><term>Verre</term><term>Matériau anisotrope</term><term>Matériau conducteur</term><term>Matériau composite</term><term>Matériau dopé</term><term>Affichage écran plat</term><term>Circuit intégré</term><term>8105K</term><term>6860B</term><term>ITO</term></keywords><keywords scheme="Wicri" type="concept" xml:lang="fr"><term>Corrosion</term><term>Verre</term><term>Matériau composite</term></keywords></textClass></profileDesc></teiHeader><front><div type="abstract" xml:lang="en">Indium tin oxide (ITO) has been widely used in liquid crystal displays (LCD). Contamination and moisture have proved to have the adverse effect of causing ITO corrosion/degradation. The purpose of this paper is to determine if scratching the surface of ITO is a cause of ITO degradation. Additionally, the influence of the width of ITO tracks on degradation was observed under accelerated testing. Simultaneously, anisotropic conductive adhesive film (ACF) was added to the ITO surface, to determine any adverse degradation effect. It was determined that the time to initiate corrosion was faster if the ITO was scratched, and that the degradation was directly related to the surface area of the ITO electrodes.</div></front></TEI><inist><standard h6="B"><pA><fA01 i1="01" i2="1"><s0>0167-9317</s0></fA01><fA02 i1="01"><s0>MIENEF</s0></fA02><fA03 i2="1"><s0>Microelectron. eng.</s0></fA03><fA05><s2>101</s2></fA05><fA08 i1="01" i2="1" l="ENG"><s1>A study of degradation of indium tin oxide thin films on glass for display applications</s1></fA08><fA11 i1="01" i2="1"><s1>LEUNG (W. S.)</s1></fA11><fA11 i1="02" i2="1"><s1>CHAN (Y. C.)</s1></fA11><fA11 i1="03" i2="1"><s1>LUI (S. M.)</s1></fA11><fA14 i1="01"><s1>Department of Electronic Engineering, City University of Hong Kong, 83 Tat Chee Avenue</s1><s2>Kowloon Tong</s2><s3>HKG</s3><sZ>1 aut.</sZ><sZ>2 aut.</sZ></fA14><fA14 i1="02"><s1>Varitronix Group, 9/F, Liven House, 61-63 King Yip Street</s1><s2>Kwun Tong, Kowloon</s2><s3>HKG</s3><sZ>3 aut.</sZ></fA14><fA20><s1>1-7</s1></fA20><fA21><s1>2013</s1></fA21><fA23 i1="01"><s0>ENG</s0></fA23><fA43 i1="01"><s1>INIST</s1><s2>20003</s2><s5>354000502900150010</s5></fA43><fA44><s0>0000</s0><s1>© 2012 INIST-CNRS. All rights reserved.</s1></fA44><fA45><s0>19 ref.</s0></fA45><fA47 i1="01" i2="1"><s0>12-0436265</s0></fA47><fA60><s1>P</s1></fA60><fA61><s0>A</s0></fA61><fA64 i1="01" i2="1"><s0>Microelectronic engineering</s0></fA64><fA66 i1="01"><s0>NLD</s0></fA66><fC01 i1="01" l="ENG"><s0>Indium tin oxide (ITO) has been widely used in liquid crystal displays (LCD). Contamination and moisture have proved to have the adverse effect of causing ITO corrosion/degradation. The purpose of this paper is to determine if scratching the surface of ITO is a cause of ITO degradation. Additionally, the influence of the width of ITO tracks on degradation was observed under accelerated testing. Simultaneously, anisotropic conductive adhesive film (ACF) was added to the ITO surface, to determine any adverse degradation effect. It was determined that the time to initiate corrosion was faster if the ITO was scratched, and that the degradation was directly related to the surface area of the ITO electrodes.</s0></fC01><fC02 i1="01" i2="X"><s0>001D11G05</s0></fC02><fC02 i1="02" i2="X"><s0>001D03H</s0></fC02><fC02 i1="03" i2="X"><s0>001D11E01</s0></fC02><fC02 i1="04" i2="X"><s0>001D05C</s0></fC02><fC02 i1="05" i2="X"><s0>240</s0></fC02><fC03 i1="01" i2="X" l="FRE"><s0>Dégradation</s0><s5>01</s5></fC03><fC03 i1="01" i2="X" l="ENG"><s0>Degradation</s0><s5>01</s5></fC03><fC03 i1="01" i2="X" l="SPA"><s0>Degradación</s0><s5>01</s5></fC03><fC03 i1="02" i2="X" l="FRE"><s0>Endommagement</s0><s5>02</s5></fC03><fC03 i1="02" i2="X" l="ENG"><s0>Damaging</s0><s5>02</s5></fC03><fC03 i1="02" i2="X" l="SPA"><s0>Deterioración</s0><s5>02</s5></fC03><fC03 i1="03" i2="X" l="FRE"><s0>Addition étain</s0><s5>03</s5></fC03><fC03 i1="03" i2="X" l="ENG"><s0>Tin addition</s0><s5>03</s5></fC03><fC03 i1="03" i2="X" l="GER"><s0>Zinnzusatz</s0><s5>03</s5></fC03><fC03 i1="03" i2="X" l="SPA"><s0>Adición estaño</s0><s5>03</s5></fC03><fC03 i1="04" i2="3" l="FRE"><s0>Couche ITO</s0><s5>04</s5></fC03><fC03 i1="04" i2="3" l="ENG"><s0>ITO layers</s0><s5>04</s5></fC03><fC03 i1="05" i2="3" l="FRE"><s0>Affichage cristaux liquides</s0><s5>05</s5></fC03><fC03 i1="05" i2="3" l="ENG"><s0>Liquid crystal displays</s0><s5>05</s5></fC03><fC03 i1="06" i2="X" l="FRE"><s0>Contamination</s0><s5>06</s5></fC03><fC03 i1="06" i2="X" l="ENG"><s0>Contamination</s0><s5>06</s5></fC03><fC03 i1="06" i2="X" l="SPA"><s0>Contaminación</s0><s5>06</s5></fC03><fC03 i1="07" i2="X" l="FRE"><s0>Humidité</s0><s5>07</s5></fC03><fC03 i1="07" i2="X" l="ENG"><s0>Humidity</s0><s5>07</s5></fC03><fC03 i1="07" i2="X" l="GER"><s0>Feuchtigkeit</s0><s5>07</s5></fC03><fC03 i1="07" i2="X" l="SPA"><s0>Humedad</s0><s5>07</s5></fC03><fC03 i1="08" i2="X" l="FRE"><s0>Corrosion</s0><s5>08</s5></fC03><fC03 i1="08" i2="X" 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superficial</s0><s5>12</s5></fC03><fC03 i1="13" i2="X" l="FRE"><s0>Oxyde d'indium</s0><s5>22</s5></fC03><fC03 i1="13" i2="X" l="ENG"><s0>Indium oxide</s0><s5>22</s5></fC03><fC03 i1="13" i2="X" l="GER"><s0>Indiumoxid</s0><s5>22</s5></fC03><fC03 i1="13" i2="X" l="SPA"><s0>Indio óxido</s0><s5>22</s5></fC03><fC03 i1="14" i2="X" l="FRE"><s0>Couche mince</s0><s5>23</s5></fC03><fC03 i1="14" i2="X" l="ENG"><s0>Thin film</s0><s5>23</s5></fC03><fC03 i1="14" i2="X" l="GER"><s0>Duennschicht</s0><s5>23</s5></fC03><fC03 i1="14" i2="X" l="SPA"><s0>Capa fina</s0><s5>23</s5></fC03><fC03 i1="15" i2="X" l="FRE"><s0>Verre</s0><s5>24</s5></fC03><fC03 i1="15" i2="X" l="ENG"><s0>Glass</s0><s5>24</s5></fC03><fC03 i1="15" i2="X" l="GER"><s0>Glas</s0><s5>24</s5></fC03><fC03 i1="15" i2="X" l="SPA"><s0>Vidrio</s0><s5>24</s5></fC03><fC03 i1="16" i2="X" l="FRE"><s0>Matériau anisotrope</s0><s5>25</s5></fC03><fC03 i1="16" i2="X" l="ENG"><s0>Anisotropic material</s0><s5>25</s5></fC03><fC03 i1="16" i2="X" 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circuit</s0><s5>48</s5></fC03><fC03 i1="21" i2="X" l="GER"><s0>Integrierte Schaltung</s0><s5>48</s5></fC03><fC03 i1="21" i2="X" l="SPA"><s0>Circuito integrado</s0><s5>48</s5></fC03><fC03 i1="22" i2="X" l="FRE"><s0>8105K</s0><s4>INC</s4><s5>56</s5></fC03><fC03 i1="23" i2="X" l="FRE"><s0>6860B</s0><s4>INC</s4><s5>57</s5></fC03><fC03 i1="24" i2="X" l="FRE"><s0>ITO</s0><s4>INC</s4><s5>82</s5></fC03><fN21><s1>338</s1></fN21><fN44 i1="01"><s1>OTO</s1></fN44><fN82><s1>OTO</s1></fN82></pA></standard></inist></record>Pour manipuler ce document sous Unix (Dilib)
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